|
 Chemical blending and delivery modules
|
|
We design, fabricate, assemble, and integrate tools and custom facility
equipment. From blending and delivery to filtration and analysis, our chemical
modules are designed with emphasis on safety, chemical compatibility, and
maintainability. Whether the module is feeding a sub-assembly, a tool, or a
facility, our Products are designed and manufactured to customers'
specifications. Our design team is dedicated to providing leading edge, cost
effective, and high quality solutions to a wide variety of requirements. |
|
Chemical Delivery (Dispense) Modules
Our chemical delivery modules provide accurate distribution of fluids to a
required destination. Whether the module is feeding a sub-assembly, a tool, or
a facility, our products are designed and manufactured to the customer's
specifications. |
|
Chemical Blending Modules (Point-of-Use)
Our chemical blending modules safely and accurately blend or dilute multiple
chemicals. They not only meet our customers' functional requirements, but are
also designed to meet space constraints and aesthetic preferences. |
 |
|
Filtration Modules
The removal of particles from critical processes involving chemicals and slurry
requires advance technology solutions. We have aligned ourselves
with the best designers and manufacturers in the industry to provide leading
edge solutions tailored to our customers’ specific requirements. |
|
|
Process Chamber Modules
From wet to dry, we have the experience in the design and manufacturing of
process chamber modules for wet OEM tools. We can design and manufacture
plating cells, spin-rinse dryers, and other fluid handling systems. In
addition, our knowledge of chemical compatibility with respect to structural
integrity enables us to provide solutions preventing field accidents. |
|
Analytical systems
Our analytical systems are designed to provide easy access to critical
information throughout a facility. These systems safely manage and efficiently
retrieve and distribute data to defined areas. The product line includes
systems to measure particulate size in slurry as well as systems used to
identify the ratio of copper sulfate in waste. |
|
Parts cleaning systems
Our parts cleaning systems remove deposited materials on process equipment
components or wafers through chemical vapor or acid exposure. These Products
have been designed to safely remove implanted or diffused materials on
peripheral components or process equipment. |
|
Part maintenance systems
From simple DI/N2 sinks to pump rework stations, our part maintenance systems
allow process equipment components to be repaired and maintained in a safe
location. These products have not only been designed to a reduced footprint,
but have also been considered for maintainability. |
|
Totes, carts, etc.
Our totes and carts safely store and transport tools, products, and fluids
throughout a facility. The use of our totes, carts, and storage cabinets
minimize human exposure to harmful agents and provide organized and safe
transportation of devices. |
|
Primary Storage Modules
Our’s primary storage modules range in size, shape and materials of
construction. From simple tanks with inlets and outlets to fully enclosed units
with recirculation loops, monitoring systems, and complex pumping units, they
are all designed to safely contain liquids at varying temperatures. Whether the
application calls for a stand-alone or integrated module, our design team can
provide the optimal solution. |
