Applications:
Fast
response for low temperature (LPCVD) and
diffusion up to 11000C.
High
velocity cooling element systems provide
rapid furnace cooling to improve cycle time
and process integerity, while maintaining
a controlled atmosphere during temperature
ramp segments.
Vertical
heating elements for processes with increased
reliability, minimal wear and improved processes
performance.
Heavy
duty, heating elements provide excellent
processes results of atmospheric and LPCVD
applications. These products provide precise
process temperature control, ranging from2000C
to 13500C, as well as consistent,
day- in and day-out perfomance that reduces
maintenance time and replacement expenses
over the life of the furnace system.
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