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One of the main concerns facing the
semiconductor industry is the need for high purity process fluids, gases and water at every stages of
its manufacturing processes. For the purification and filtration
of gases, fluids and water, Flokal supplies a wide range of filtersbrands such as Mykrolis-Millipore,
Pall, Cuno and others for
the following applications:
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 Chemical
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Gas
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Di water / High purity water
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Microlithography
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Photoresist
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Gas Purification
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Chacollet™ In-Line Hydrocarbon
Purifier and Gas Filters |
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The Chacollet in-line gas filter/purifier provides
filtration of inert gases. The Chacollet provides < 1 ppb purity in gas
streams up to 30 slpm. Ideal for purging applications. |
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Waferpure® Gas Cabinet 300 Gas
Purifier |
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The Waferpure Gas Cabinet 300 Purifier integrates
filtration and purification technology in one self-contained unit. The filter /
purifier functions not only as particle filter, but also as a molecular filter.
Volatile impurities, including moisture, oxygen, carbon monoxide and carbon
dioxide, are removed. The Waferpure Gas Cabinet 300 Purifier provides a
final safeguard in the process tool against contamination that can disrupt the
process. In gas cabinets, the purifier can improve the reliability and longevity
of system components. |
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Waferpure® Micro/Mini XL/Megaline
Integrated Filters/Purifiers |
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The Waferpure Micro/Mini XL Megaline integrates filtration and purification
technology in one self-contained unit. The purifier functions not only as a
particle filter, but also as molecular filter. Volatile impurities, including
moisture, oxygen, carbon monoxide and carbon dioxide, are removed. The Waferpure Micro/Mini XL Megaline provides a final safeguard in the process
tool against contamination that can disrupt the process. In gas panel configurations, the purifier can improve the reliability and longevity of system
components. |
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Waferpure® SL 1.125” C-Seal Purifiers
Integrated Filter/Purifier |
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The Waferpure SL 1.125" C-Seal Purifier integrates
filtration and purification technology in one self-contained unit. The filter /
purifier functions not only as particle filter, but also as a molecular filter.
Volatile impurities, including moisture, oxygen, carbon monoxide and carbon
dioxide, are removed. The Waferpure SL 1.125" C-Seal Purifier provides a
final safeguard in the process tool against contamination that can disrupt the
process. In gas stick configurations, the purifier can improve the reliability
and longevity of system components. |
Gas Filtration
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ChamberGard™ Fast Vent
Diffusers |
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The choice to reliably increase system throughput by
minimizing load lock vent cycle time. The ChamberGard Fast Vent Diffusers
provide RAPID venting to atmosphere without disturbing or adding particles to
wafers in the chamber. |
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Gasketgard™ Inline Gasket
Filters |
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The Gasketgard filter is a compact, all-metal filter
that fits in place of standard 1/4” VCR gaskets in gas distribution systems.
These compact filters protect sensitive gas components, such as mass flow
controllers, regulators and valves from particle damage. The Gasket filters are
an economical safegard against contamination that can have an adverse effect on
these critical components. |
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Linegard™ Micro Inline Gas
Filters |
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The Linegard Micro is a compact inline gas filter
which is made of 100% SUS316L. It removes 0.2 µm particles. These filters
protect sensitive gas components, such as mass flow controllers, regulators and
valves from particle damage. The Linegard Micro filter is an economical safegard
against contamination that can have an adverse effect on these critical
components. |
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Unigard™ Inline Gas
Filters |
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The Unigard filter is an all-in-one union and filter
designed to fit in placed of standard 1/4” gasket seal fittings in the gas
distribution line. These filters protect sensitive gas components, such as mass
flow controllers, regulators and valves from particle damage. The Unigard filter
is an economical safegard against contamination that can have an adverse effect
on these critical components. The Unigard
filter has an all-metal construction, making it ideal for use in applications
with high temperature and dynamic pressure requirements. The all-metal
construction also eliminates outgassing and is corrosionresistant. |
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Wafergard® GN Gas Filter
Gun |
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Mykrolis’s Wafergard GN gas filter gun is designed for
the point-of-use filtration of compressed gas. With its Wafergard GN filter
element, an exclusive Mykrolis design, the Wafergard gas filter gun offers these
significant advantages: Superior Durapore Membrane, High Effective Filtration Area,
Reliable Performance, Corrosion Resistant. |
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Wafergard® II F-6 In-Line Gas
Filter |
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Wafergard II F-6 in-line gas filters are the filters
of choice for ultra-high purity gas system filtration. These filters have
excellent compatibility with all classes of semi-conductor gases and offer high
efficiency filtration with optimal flow differential performance. |
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Wafergard II F Micro Inline Gas
Filters |
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For ultra-high-purity gas systems, your best choice is
the Wafergard II F micro inline gas filter. Recommended for inert and reactive
gases, this device offers excellent compatibility with all classes of
semiconductor process gases. Its compact diameter of 19.05 mm (0.75”) enables
easy installation in space-restrictive gas panels and cabinets. |
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Wafergard® II F Mini XL Inline Gas
Filters |
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Wafergard II F Mini XL in-line gas filters are the
filters of choice for ultra-high purity gas system filtration. Recommended for
filtering inert and reactive gases, these filters offer excellent compatibility
with all classes of semiconductor process gases. Use them in gas panels and gas
cabinets where ultra-high purity is required for wafer processing. |
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Wafergard® II SF Mini & Mini
XLIn-Line Gas Filters |
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Wafergard II SF gas filters are the filter of choice
for high purity gas systems when all-stainless steel construction is preferred.
A state-of-the-art housing assembly eliminates outgassing by minimizing weld
area. The all-metal construction is ideal for high temperature and dynamic
pressure applications. Its compact size and flexible choice of fittings provides
ultimate design efficiency and minimizes engineering costs. |
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Wafergard® III NF-750 Gas
Filters |
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Wafergard III nickel filters are the cleanest, most
efficient all-metal filters available. The patented nickel filter membrane (U.S.
Patent No. Re 36,249) offers superior corrosion resistance and excellent
compatibility with inert and corrosive gases. The innovative housing design eliminates outgassing and reduces drydown
time. The Wafergard III NF-750 provides the strength of Millipore metal membrane
with the pressure drop and compact size of Teflon fluoropolymer filters. |
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Wafergard® GT Plus In-Line Gas
Filters |
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Designed to remove particles from inert gases for flow
rates up to 30 slpm (1 scfm) |
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Wafergard® II F-40 Inline Gas
Filters |
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Wafergard II F-40 in-line gas filters are the filters
of choice for ultra-high purity gas system filtration. These filters have
excellent compatibility with all classes of semi-conductor gases and offer high
efficiency filtration with optimal flow differential performance. |
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Wafergard® III NF-30 Gas Filters |
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Wafergard nickel filters are the cleanest, most
efficient all-metal filters available. The patented nickel filter membrane
offers superior corrosion resistance and excellent compatibility with inert and
reactive gases. A state-of- the-art
housing assembly eliminates outgassing by minimizing weld area. The all-metal
construction is ideal for high temperature and dynamic pressure applications.
Its compact size and flexible choice of fittings provides ultimate design
efficiency and minimizes engineering costs. |
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Wafergard® III NF-75 In-Line Gas
Filters |
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Wafergard III nickel filters are the cleanest, most
efficient all-metal filters available. The patented nickel filter membrane
offers superior corrosion resistance and excellent compatibility with inert and
reactive gases. A state-of-the- art housing
assembly eliminates outgassing by minimizing weld area. The all-metal
construction is ideal for high temperature and dynamic pressure applications.
Its compact size and flexible choice of fittings provides ultimate design
efficiency and minimizes engineering costs. |
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Wafergard® III NF Micro In-Line Gas
Filters |
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Wafergard III nickel filters are the cleanest, most
efficient all-metal filters available. The patented nickel filter membrane
offers superior corrosion resistance and excellent compatibility with inert and
reactive gases. A state-of-the- art housing
assembly eliminates outgassing by minimizing weld area. The all-metal
construction is ideal for high temperature and dynamic pressure applications.
Its compact size and flexible choice of fittings provides ultimate design
efficiency and minimizes engineering costs. |
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Wafergard® MAX In-Line Teflon® Gas
Filters |
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Wafergard MAX Inline Teflon Filters provide the
industry's best filters for ultra-high purity gas systems. Available in Bronze
and Silver performance levels, the MAX series is specifically designed for high
flow and low delta-pressure applications. The Wafergard product line provides
ultimate process protection. Whatever your precess needs, the Wafergard family
of filter provides ultimate purity, superior corrosion resistance, and excellent
compatibility with all gases. Wafergard MAX is suitable for facility hook-up, valve
manifold boxes, and point of use gas panel applications. The high surface area
membrane provides minimal pressure drop for low vapor pressure gases. The all
Teflon filter element is compatible with high purity gases as well as general
nitrogen and CDA applications. |
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Wafergard® SL 1.125" C-Seal Gas
Filter |
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Wafergard SL 1.125" C-Seal Filters combine the
industry’s best filters with the industry’s smallest surface-mount design. The
Wafergard product line provides ultimate process protection. Whatever your
process needs, the Wafergard family of filter provides ultimate purity, superior
corrosion resistance, and excellent compatibility with a full range of
gases. Mykrolis's SurfaceLine filters
consume the least amount of space on gas panels compared to standard inline
designs, while reducing parts inventories and variations. |
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Wafergard® T-Line Gas Filter
Units |
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Designed and manufactured for the removal of particles
in non-toxic and non-flammable inert gas applications. Fitted with the appropriate Wafergard filter cartridges, the
system effectively retains particles of 0.003µm size and above. |
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Wafergard®
W-Seal Mini
Filters |
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Wafergard W-Seal Mini Filters provide the industry’s
best filters in a surface-mount design. Available with stainless steel or nickel
filter elements, the Wafergard product line provides ultimate process
protection. Whatever your process needs, the Wafergard family of filter provides
ultimate purity, superior corrosion resistance, and excellent compatibility with
inert, hydride and reactive gases. Surface mount gas filter
designs consume less space on gas panels than standard inline designs, while
reducing parts inventories and variations.
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High Purity Water
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RinseGard HP and HPX Cartridge
Filters |
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Rinsegard HP/HPX Cartridge Filters optimize wafer
quality by removing trace metallic ions, even from ultra-pure water. Trace
metals in ultra-pure water—at the wet etch, clean process, and especially the
rinse stages—can increase metal contamination of the wafer and decrease minority
carrier lifetime measurement. But detecting low concentrations of trace metals
presents a challenge. Conventional resistivity monitoring equipment cannot
accurately measure or monitor trace metallic ions in the low parts per trillion
(ppt) range. Rinsegard HP/HPX Cartridge
Filters, with hydrophilic, patented UPE membrane, remove a finite mass of
multi-valent metal ions and particles from ultra-pure water and offer superior
particle performance, providing more than 99.9% removal at the rated pore
sizes. |
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Rinsegard™ HPX Disposable
Filters |
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The Rinsegard HPX Disposable Filter optimizes wafer
quality by removing trace metallic ions, even from ultrapure water. Trace metals
in ultra-pure water—at the wet etch, clean process, and especially the rinse
stages—can increase metal contamination of the wafer and decrease minority
carrier lifetime measurement. Metal impurities can affect quality, even when
using ultra-pure water. But detecting low concentrations of trace metals
presents a challenge. Conventional resistivity monitoring equipment cannot
accurately measure or monitor trace metallic ions in the low parts per trillion
(ppt) range. The Rinsegard HPX Disposable Filters remove a finite mass of
multi-valent metal ions from ultra-pure water and offer superior particle
performance, providing more than 99.9% removal at the selected retention
rating. |
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Protego™ Metal Ion Purifier and
Purifier/Filter |
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PROTEGO Metal Ion Purifiers deliver ultimate
protection from metal ion contamination by providing high capacity, single pass
removal of metal ions from ultra-high purity water and some organic solvents.
Ideal for critical cleaning applications including DI water rinse on
recirculation and single pass process tools, wafer dry and post CMP
clean. The unique PROTEGO metal ion purifier removes low
levels of most cationic metals in a single-pass application. Mykrolis has
developed the ultimate long-life metal ion removal technology to maximize your
total filtration volume and system uptime. |
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Processgard™ CJ Cartridge
Filters |
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Processgard CJ Cartridge Filters deliver quality
performance for prefiltration of DI water and chemicals. These depth filter are
available in a wide range of retention ratings (0.5 µm to 100 µm) and in filter
lengths from 10” to 30” to suit specific application requirements. Processgard CJ filters are made of polypropylene or
cotton that has excellent chemical compatibility. These filters are recommended
for pre-filtration of various solutions to deliver long life
performance. |
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Processgard™ CN Cartridge
Filters |
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Processgard CN cartridge filters are designed for the
removal of particles and microorganisms from liquids and gases. Used in
clarification and prefiltration applications, these versatile, pleated products
retain contaminants primarily on the surface of the filter media. Downstream
filter performance is enhanced due to efficient particle and microorganism
reduction. Processgard CN cartridges are available in a range of retention
ratings, lengths, and connections to suit your individual applications. Processgard CN cartridge filters efficiently remove
silica particles, carbon fines, resin fines, and other particulates and
microorganisms. |
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Processgard™ CR Cartridge
Filters |
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Processgard CR high efficiency cartridge filters are
widely used in chemical, electronic and semiconductor industries for liquid and
gas prefiltration applications. The graded density polypropylene medium provides
exceptional throughput and long service life. Processgard CR filters retain contaminants by means of
a multi-stage, graded density design. They provide a full range of retention
ratings with high retention efficiency. |
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Panelgard™ Cartridge
Filters |
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Manufacturing of LCD displays uses large amounts of
pure and ultrapure water. Increase in demand for large LCD displays necessitates
more stringent cleaning for glass substrates and high flow rates. The Panelgard
Cartridge Filter is specially designed to meet such demands. It effectively
reduces particles at high flow rates at point-of-use of ultrapure and pure
water. |
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Panelgard™ DI Cartridge
Filters |
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Manufacturing of LCD displays uses large amounts of
pure and ultrapure water. Increase in demand for large LCD displays necessitates
more stringent cleaning for glass substrates and high flow rates. The Panelgard
DI Cartridge Filter is specially designed to meet such demands. It effectively
reduces particles at high flow rates of pure water. |
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Durapore® TPE Electronics Cartridge
Filters |
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Durapore TPE electronics cartridge filters provide clean, durable performance
for a broad range of semiconductor process fluids, including dilute acids, DI
water, and many alcohol-based and aromatic-based solvents. Its hydrophilic, PVDF
membrane eliminates the need to pre-wet the filter cartridge with alcohol prior
to use with aqueous solutions. Durapore TPE cartridge filters are ideally suited
for bulk high-volume chemical filtration applications. |
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Ultrastak DI Water Ultrafiltration
Systems |
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Description
- Provides superior retention and high flow rates
- Available in 10, 20, and 40 ft2 systems
- Completely ozone-compatible
Applications
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CMP Solutions
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Planargard® Point-of-Use
Filters |
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The Planargard filter relies on a graded-
density depth
filter design that enables it to retain defectcausing agglomerates in each of
its four layers. This design provides excellent retention of agglomerates while
allowing desired slurry particles to reach the surface of the wafer. Because
particles are retained throughout the filter matrix rather than on a single
surface, the potential for premature filter “plugging” is greatly
reduced.
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Planargard® Point-of-Use Disposable
Filters |
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The Planargard filter relies on a graded-density depth
filter design that enables it to retain defectcausing agglomerates in each of
its four layers. This design provides excellent retention of agglomerates while
allowing desired slurry particles to reach the surface of the wafer. Because
particles are retained throughout the filter matrix rather than on a single
surface, the potential for premature filter “plugging” is greatly
reduced. |
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Planargard® CS Bulk and Point-of-Use
Cartridge Filters |
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The Planargard CS filter relies on a graded- density
depth filter design that enables it to retain defectcausing agglomerates in each
of its layers. This design provides excellent retention of agglomerates while
allowing desired slurry particles to reach the surface of the wafer. Because
particles are retained throughout the filter matrix rather than on a single
surface, the potential for premature filter “plugging” is greatly
reduced. |
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Processgard™ NP Cartridge and
Disposable Filters |
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Processgard NP cartridge filters are multi- layered
depth filters with a non-woven polypropylene membrane. Suitable for prefiltering
for the flat panel display wet processing or electronic parts plating
processes.Processgard NP filters retain contaminants by means of
a multi-stage, graded density design. A full range of retention ratings with
high retention efficiency lets you optimize for your specific process
stream. |
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Solaris® Filtration Technology
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As the industry moves to reduce defects on wafers,
filtration at point of use will provide additional protection against the
delivery of defect causing particles and agglomerates. Solaris Technology offers
two levels of filtration to choose from depending upon your particular needs.
SLR01 is designed for the filtration of fine particle slurries typically used in
Copper and STI processes. Whereas, the SLR03 is a more open filter for larger
particle slurries typically used for Oxide and other Metal processes.
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Solaris Filtration Technology -
Solaris Manifold
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Solaris Filtration Technology delivers long lasting,
easy to use, disposable methods of reducing defect causing particles, gels, and
agglomerates while simultaneously allowing working particles to pass. Solaris
filtration technology deliver greater than 2x the life of conventional depth
filters in the most demanding CMP applications. |
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Housings
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Chemgard™ In-Line Housing |
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Mykrolis’s Chemgard In-Line filter housings,
constructed of Teflon® fluoropolymer resin, are designed to process fluids used
to manufacture contamination-sensitive semiconductor devices. The housing’s
durable construction, leak-proof design, low profile and overall design for
efficient integration into current processes will ensure that it will last for
the lifetime of the fab with minimal cost of ownership. |
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Chemgard™ PFA Housings |
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Chemgard PFA filter housings are designed to meet the
high purity standards of process fluids used to manufacture
contamination-sensitive semiconductor devices. Constructed of Teflon® PFA 440
HP, the Chemgard PFA housings are unmatched in chemical compatibility,
cleanliness, durability and high temperature performance. |
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Chemgard™ Polypropylene High-Flow
Housings |
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Mykrolis’s Chemgard polypropylene filter housings are
designed to meet the high purity standard for process fluids used to manufacture
contamination-sensitive semiconductor devices. Chemgard polypropylene high-flow housings use a
proprietary design that allows high flow, low pressure drop, and enables smaller
footprint system configurations. Chemgard polypropylene housings are designed and
manufactured with no metal parts, threads, or components; No metal parts are
required for installation. The use of non-metal parts eliminates the risk of
ionic contaminants. Chemgard polypropylene housings utilize an external
O-ring and non - rotating bowl that ensure a leak-proof, torsion-free seal. The
locking ring design prevents contamination from the O-ring from entering into
your process. The leak-proof design provides reliable operation to ensure
minimal downtime. Filter installation is easy. Chemgard housings come with two
types of O-rings: 32A and 40A Union seal types and O-rings in EPR and Viton®
fluoroelastomer material. The unique O-ring seal and closure ensure integrity
and safety. The housing design provides extremely low holdup volume with minimal
installation space. |
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Chemgard™ Polypropylene
Housings |
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Mykrolis’s Chemgard polypropylene filter housings are
designed to meet the high purity standard for process fluids used to manufacture
contamination-sensitive semiconductor devices. The housing’s polypropylene
construction is durable and economical. Chemgard polypropylene housings are designed and
manufactured with no metal parts, threads, or components; no metal parts are
required for installation. The use of non-metal parts eliminates the risk of
ionic contaminantion. |
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Chemgard™ PVDF Housings |
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Mykrolis’s Chemgard PVDF filter housings are designed
to meet the high purity standard for process fluids used to manufacture
contamination-sensitive semiconductor devices. The housing’s PVDF construction
is durable and economical. Chemgard PVDF housings are designed and manufactured
with no metal parts, threads, or components; No metal parts are required for
installation. The use of non-metal parts eliminates the risk of ionic
contamination. |
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Chemgard U-Line
Housings |
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Mykrolis’s Chemgard U-Line housing, manufactured with
Teflon® fluoropolymer resin, is designed to meet the high-purity standards for
process fluids used in the semiconductor industry. The U-Line housing’s unique
design allows it to be plumbed into extremely small spaces. In addition, its
durable construction and leakproof design ensure efficient integration into the
fab. With the inlet and outlet on the top of the head of the housing, the U-Line
can be utilized in corners, in compact manifold systems or areas where space is
critical. When wet bench space is at a minimum, the U-Line offers the proven
reliability of the Chemgard housing in a verticle head design. |
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Chemlock™ PFA Housing &
Cartridges |
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Mykrolis’s Chemlock PFA Housing offers a space saving
solution like no other cartridge filter housing available today. This
revolutionary new housing locks the cartridge into the bowl, allowing the bowl
and cartridge to be removed as a single unit. Cartridge changeout has never been easier. The
Chemlock bowl is used as a tool when installing and removing a cartridge. After
the cartridge is inserted into the bowl, a ¼ turn locks the cartridge into
place. The Chemlock bowl and cartrige filter are sealed to the Chemlock head,
quickly and easily. By turning the locking ring, the cartridge is pushed
vertically into the housing head, ensuring perfect alignment and cartridge
O-ring engagement every time! Operators do not have to touch the cartridge body
during cartridge changeout, which minimizes exposure to chemicals. |
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HP Housings |
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Mykrolis’s HP filter housings are high quality and
easy-to-use. They are manufactured from highly corrosion resistant SUS316L
stainless steel. For piping connections, choose either PT 3/4”, or JIS 10K 20A
FF Flange Spec. The interior is electropolished with Buff #400, so the
housing can be used for sub-micron filtration. The reverse T design of the HP housing hardly retains
any liquids during cartridge replacement. The unique O-ring seal and closure ensure integrity.
The HP housing seal is secure as the O-ring is clamped with a flange and
fastened with bolts. The HP housing is designed for high operating pressure
and can be used safely for gas filtration. |
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PFA 16 Housings |
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All wetted surfaces of PFA 16 Housings are PFA for
broad chemical compatibility. The stainless steel locking ring ensures high
pressure capability and is outside the fluid path. The housing features a clean design with integrated
fittings. Lighter than conventional housings, the PFA 16 Housing
is easy to install and features a single clamp for easy filter
replacement. |
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PLJ/PSJ Housings |
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Mykrolis’s PLJ/PSJ housings are filter housings of
high quality design that are recommended for semiconductor and high purity
chemical processing. PLJ/SPJ housings are constructed of SUS316, which has good
resistance to corrosive chemicals. Its high quality electropolished finish
eliminates harmful contaminants from leaching into the process
stream. The PLJ/PSJ housing’s screw-in clamp band makes
cartridge changeout very easy. The PLJ/PSJ housings are available in lengths from 4
to 30 inches to accommodate a wide range of filter sizes. PLJ housings can accommodate seal type, O-ring type,
or flat type filter cartridges. |
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PS-1 Stainless Steel
Housings |
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Description
- Can be used with 10", 20" and 30" pleated cartridge filters.
- An economical, general purpose stainless steel housing.
Applications
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Series 2000 Standard Single
Housings |
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All wetted surfaces are constructed of passivated 316L stainless steel.
Accommodates a 2-222 O-ring cartridge configuration allowing a positive
cartridge seal preventing particulate by-pass. TC-type sanitary connections.
General purpose stainless steel housing for code 0 cartridges. |
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Stainless Steel Housings for
Wafergard F Cartridge Filters |
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Designed for use with Wafergard F-4 and F-16 stacked-disc filter
cartridges. Constructed of 316L electropolished stainless steel. |
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Stainless Steel PF
Housings |
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Mykrolis’s Stainless Steel PF filter housings are
recommended for critical high pressure filtration of highpurity solvents, as
well as non-toxic and non-reactive inert gases. All wetted surfaces are
electropolished 316L stainless steel. The high quality electropolish finish eliminates
harmful contaminants that could potentially leach into the process
stream. Mykrolis’s Stainless Steel PF filter housings can be
used in high flow central applications as well as low flow point-of-use
applications. They are recommended for permanent in-line plumbing.
Interchangeable bowls allow use the use of 4” or 10” cartridge
filters. |
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Wafergard® 40-Stack Housings
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Cost-effective, application specific options are
available to meet your filtration needs. The all-PVDF flow path provides a clean
filtration environment for water, and dilute acids. The ECTFE housing provides
the extra durability needed to provide filtration of aggressive chemicals at
ambient temperature. Molded on 3/8" FNPT inlet/outlet fittings allow easy
plumbing connection (adapters available to 3/8" and 1/4" compression seal
fittings). The drain and vent locations allow versatility during installation.
Compact design allows easy installation into new or existing locations in your
process path. A housing wrench is available to ensure rapid and safe
removal of the filter bowl. O-rings are available in Viton®, EPR, and Silicone.
Housing bracket is also available. |
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COMBI-FLOW Filters
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Inherent
to its construction, thermal mass flow meters and –controllers for gases are
sensitive to contamination. To increase the MTBF (Mean Time Between Failure) it
is important to make sure that the gas entering the instrument is clean. The
COMBI-FLOW filter provides this service. The filter element can be replaced
without removing the base from the pipe. |
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TYPES
OF FILTERS Basically there are two
types:
PVDF Filters
For semiconductor industrial
applications with a verified retention rating at 0.003 mm smallest
particle measured, and greater than 99.9999999% removal of all particles.
Sintered metal 316L Filters
For general purpose filtration. |
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IN-LINE Filters
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Inherent
to the construction thermal mass flow meters and -controllers for gases are
sensitive to
contamination. To increase
the MTBF (Mean Time Between Failure) it is important to make sure
that the gas entering the
instrument is clean. The IN-LINE Filter Assembly screwed into the inlet of
the instrument provides
this service. |
|
TYPES
OF FILTERS Basically there are two
types:
PVDF Filters
For semiconductor industrial
applications with a verified retention rating at 0.003 mm smallest
particle measured, and greater than 99.9999999% removal of all particles.
Sintered metal 316L Filters
For general purpose filtration. |
