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Magnetic Liquid Feedthroughs
Magnetic liquid, also called ferrofluids, are currently used as vacuum seals where rotary motion is to be transmitted into the vacuum vessel and in a wide range of applications where an hermetic vacuum seal is a prime requirement. A basic magnetic fluid seal has an annular, axially polarized permanent magnet contacting two stationary pole pieces, fluid, and the shaft. The parts create a closed magnetic circuit that holds ferrofluid in the gaps, forming a liquid sealing ring and produces a hermetic seal. Differential pressure deforms the liquid seal. In vacuum-manufacturing processes, magnetic fluids seal feedthroughs transmitting rotary motion into the vacuum chamber with minimal torque losses. Advantages • Vacuum Sealing - A magnetic fluid seal provides a hermetic seal of vacuum under both static and dynamic conditions against gases, vapors and other contaminants. • Long-term - Since no friction between the rotating and stationary components the Magnetic Liquid Feedthroughts is using in operation many years without a replacement • High Reliability - The high reliability provides simplicity of construction: two magnetic circuits and low volatility of magnetic liquid. • Non-Contaminating - These devices not have of mechanical friction between the magnetic fluid and the static seal components, no particles are produced which could contaminate the your work system. The magnetic fluid maintains seal  in high vacuums better than 10-9 mbar. • High Speed Capability - Magnetic fluid seals provide hermetic sealing even at high rotational speeds.
Applications • Seale for Vacuum - Magnetic Liquid Feedthroughts have become the industry standard for wide-ranging applications in the vacuum. Many semiconductor fabrication techniques use high vacuum equipment. Some execute simple tasks, such as rotation; others perform multi-function roles, such as rotation and transportation of services in to the vacuum chamber. Semiconductor processes:PVD (Physical Vapor Deposition – sputtering, electron beam gun); CVD (Chemical Vapor Deposition); MOCVD (Metal Organic Chemical Vapor Deposition); Ion implantation; Ion beam and RF etching; Epi deposition. • Seals for Dust-proof - Hard disk, Air-blast Disintegrator and Airflow size classifier. • Seals for Gas - For example, seals for coal gas. • The Others Direct Replacement - The feedthroughs are designed with specification for many fields, can be direct replacement for these applications. • Requirement for special applications - The special model can be designed to satisfy these applications. The using of water-cooled pole pieces for extended life. Very heavy duty (VHD) model is ready to meet very heavy load parameters.
Through-Hole mount sealed spindles – bolt type   Shaft Diameter 012 020 A 12 20 B 179 211 C 109 121 D M25 × 1.5 M30 × 1.5 E 4 × 2.5 × 20 6 × 3.5 × 25 F 40 55 J 48 63 K 74 82 L 36.5 40.5   Model Number SM0012 SM020 Maximum no-load speed *[rpm] 10000 7000 Degree of vacuum pressure [Pa] 10 -5 - 10 -7 Leakage Rate(He) [Pa·m3/sec]** <10 -11 Pressure Capacity(static) [105Pa] 2.0 Temperature [℃] 0-80 Housing Material 0Cr19Ni9/0Cr18Ni9 Shaft Material 0Cr17Ni4Cu4Nb *Base on safety factor of 25% availability ratio in normal temperature. ** limits of mass spectrometry
Bolt type miniature sealed spindles Shaft Diameter 004 005 006 A 4 5 6 B 76.5 76.5 76.5 E 5 5 5 F 15 15 15   Model Number SS004 SS005 SS006 Maximum no-load speed *[rpm] 15000 12000 12000 Degree of vacuum pressure [Pa] 10-5 - 10 -7 Leakage Rate(He) [Pa·m3/sec]** <10 -11 Pressure Capacity(static) [105Pa] 2.0 Temperature [℃] 0-80 Housing Material 0Cr19Ni9/0Cr18Ni9 Shaft Material 0Cr17Ni4Cu4Nb *Base on safety factor of 25% availability ratio in normal temperature. ** limits of mass spectrometry
Through-Hole mount sealed spindles –nut type   Shaft Diameter 006 010 A 6 10 B 97.5 119.5 C 57.5 69.5 D M32 × 1.5 M38 × 1.5 E 0.5 × 12 3 × 1.8 × 14 J 55 60 K 10 10 P 49 55   Model Number SM006 SM010 Maximum no-load speed *[rpm] 12000 10000 Degree of vacuum pressure [Pa] 10 -5 - 10 -7 Leakage Rate(He) [Pa·m3/sec]** <10 -11 Pressure Capacity(static) [105Pa] 2.5 Temperature [℃] 0-80 Housing Material 0Cr19Ni9/0Cr18Ni9 Shaft Material 0Cr17Ni4Cu4Nb *Base on safety factor of 25% availability ratio in normal temperature. ** limits of mass spectromet
Solid shaft feedthroughs- flange mount type   Shaft diameter 020 025 030 040 050 A 20 25 30 40 50 B 255 288 321 357 406 C 135 138 141 157 166 D 85 95 105 125 140 E 6 × 3.5 × 50 7 × 4 × 63 10 × 5 × 80 12 × 5 × 90 14 × 5.5 × 110 F 60 75 90 100 120 J 145 160 160 185 210 K 18 18 20 22 24 L 48 50 50 55.5 59.5 M 29 29 29 33 33 N 120 135 135 160 185 P 6- φ 12 6- φ 12 6- φ 12 8- φ 12 8- φ 12   Model Number SF 020SZ SF 025SZ SF 030Z SF 040Z SF 050SZ Maximum no-load speed *[rpm] 7000 6000 5200 4400 3700 Degree of vacuum pressure [Pa] 10 -5 - 10 -7 Leakage Rate(He) [Pa·m3/sec]** <10 -11 Pressure Capacity(static) [105Pa] 3.0 Temperature [℃] 0-80 Housing Material 0Cr19Ni9/0Cr18Ni9 Shaft Material 0Cr17Ni4Cu4Nb * Base on safety factor of 25% availability ratio in normal temperature. ** limits of mass spectrometry
Hollow shanft sealed spindles-flange mount type Shaft diameter 010 020 025 030 040 050 075 A 10 20 25 30 40 50 75 B 78 82.5 88 93 96 98 115 C 64 68.5 74 79 80 82 96 D 51 63 71 78 90 143 143 E 34 44 49 54 69 79 109 F 10 10 10 10 12 12 15 G 10 20 25 30 40 50 75 J 90 105 120 120 145 160 210 K 10 10 10 10 10 12 12 L 20 22.5 26 27 27 26.5 33 M 70 85 100 100 120 135 185 P 4- φ 10 4- φ 10 4- φ 10 4- φ 10 4- φ 12 4- φ 12 4- φ 12 G Recommended shaft diameter Model Number KF 010 KF 020 KF 025 KF 030 KF 040 KF 050 KF 75 Maximum no-load speed *[rpm] 12 6.9 5.8 5.1 4.1 3.9 2.6 Degree of vacuum pressure [Pa] 10 -5 - 10 -7 Leakage Rate(He) [Pa·m3/sec]** <10 -11 Pressure Capacity(static) [105Pa] 3.0 Temperature [℃] 0-80 Housing Material 0Cr19Ni9/0Cr18Ni9 Shaft Material 0Cr17Ni4Cu4Nb * Base on safety factor of 25% availability ratio in normal temperature. ** limits of mass spectrometry
Solid shaft feedthroughs – heavy duty     Shaft diameter    020 025 030 040 050 A 20 25 30 40 50 B 255 288 321 357 406 C 135 138 141 157 166 D 85 95 105 125 140 E 6 × 3.5 × 50 7 × 4 × 63 10 × 5 × 80 12 × 5 × 90 14 × 5.5 × 110 F 60 75 90 100 120 J 145 160 160 185 210 K 18 18 20 22 24 L 48 50 50 55.5 59.5 M 29 29 29 33 33 N 120 135 135 160 185 P 6- φ 12 6- φ 12 6- φ 12 8- φ 12 8- φ 12   Model Number SF 020SZ SF 025SZ SF 030Z SF 040Z SF 050SZ Maximum no-load speed *[rpm] 7000 6000 5200 4400 3700 Degree of vacuum pressure [Pa] 10 -5 - 10 -7 Leakage Rate(He) [Pa·m3/sec]** <10 -11 Pressure Capacity(static) [105Pa] 3.0 Temperature [℃] 0-80 Housing Material 0Cr19Ni9/0Cr18Ni9 Shaft Material 0Cr17Ni4Cu4Nb     *Base on safety factor of 25% availability ratio in normal temperature. ** limits of mass spectrometry
Hollow shaft sealed spindles- cartridge type      Shaft diameter   010 020 025 030 040 050 075 A 10 20 25 30 40 50 75 B 78 82.5 88 93 96 98 115 C 64 68.5 74 79 80 82 96 D 48 58 63 73 88 98 137 E 34 44 49 54 69 79 109 F 10 10 10 10 12 12 15 G 10 20 25 30 40 50 75 H 48 58 63 73 88 98 137 G Recommended shaft diameter H Recommended housing diameter Model Number KT 010 KT 020 KT 025 KT 030 KT 040 KT 050 KT 075 Maximum no-load speed *[rpm] 12 6.9 5.8 5.1 4.1 3.9 2.6 Degree of vacuum pressure [Pa] 10 -5 - 10 -7 Leakage Rate(He) [Pa·m3/sec]** <10 -11 Pressure Capacity(static) [105Pa] 3.0 Temperature [℃] 0-80 Housing Material 0Cr19Ni9/0Cr18Ni9 Shaft Material 0Cr17Ni4Cu4Nb *Base on safety factor of 25% availability ratio in normal temperature. ** limits of mass spectrometry
Shape of shaft Housing O.D or I.D of shaft Water Structure Additional information solid shaft S through hole T 004~100mm water-cooled S cantilever X Meet to the custom request hollow shaft K flange F null   heavy duty Z co-axial T nut M   standard     screw S   mini-flange W

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