- Presenting
- the
improved Flokal MFC
-
- Mass
Flow Meter
- F
261
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Features
- The
improved version of the MFC 261
- with
elastomeric seals and a new sensor:
-
Compatible
with other MFM-
Economic
design, simple construction
-
Outstanding
records throughout various industries
-
Possibility to regulate with external readout.
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Ratings
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Flow Range F261
(equivalent N2):
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from
0 slm to 20 slm
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Control Range:
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between
2 and 100% F.S.
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Accuracy:
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+/-
1% of F.S.
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Linearity:
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+/-
0.5% of F.S
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Repeatability:
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+/-
0.3% of F.S.
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Step
Response Time:
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<=
6 sec. typical (SEMI E17-91)
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Temperature
Range:
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between
5 and 40°C
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Temperature
Coefficient:
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<
0.1% F.S. /°C
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Maximum
Inlet Pressure:
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10
bar
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Minimum
Differential Pressure:
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0.5
bar (0.7 bar with H2)
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Maximum
Differential Pressure:
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3
bar
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Pressure
Coefficient:
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<
0.1% F.S./bar
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Wetted
Materials:
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316
L Stainless steel
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Leak Rate:
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<
2.10-9 scc/sec (He)
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Seals:
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standard
Viton, option Neoprene or kalrez
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Fittings:
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¼
VCR – ¼ VCO – ¼ Swagelok
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Power
Input Requirement
- Mass Flow Meter:
+/- 15 VDC, 25 mA
- Set Point Signal: from 0 to 5 VDC
- Flow Output Signal:
from 0 to 5 VDC
- Electrical Connector:
Card Edge
Options
- Separated electronics
- External readout
- Other on request
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