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 Photochemical Filtration
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Fluorex™ HP and HP-L Disposable
Filters |
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The Fluorex HP and HP-L filters use a hydrophilic PTFE
membrane for excellent chemical compatibility with aqueous-based chemicals. This
membrane provides instant wetting and high flow rates in a compact, disposable
design. A small and easy-to-handle polypropylene housing
encases Fluorex filters. The integrated design allows quick installation and
minimizes downtime. |
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Fluorex™-S and Fluorex-CN Disposable
Filters |
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Fluorex-S and Fluorex-CN disposable filters are
designed to filter liquid process chemicals at flow rates of less than 10 liters
per minute. Fluorex-S filters are constructed of Teflon® PTFE membrane on
polypropylene supports and are compatible with a wide range of solvents, acids,
and bases at ambient temperatures. Fluorex-CN filters are made entirely of
polypropylene. These filters are available in four pore sizes with 1/4” or 1/2”
compression fittings (Swagelok® fitting compatible) for convenient
installation. |
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Wafergard 40 Cartridge
Filters |
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Description
Integrity-testable by bubble point
Applications
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Wafergard® F Cartridge and Disposable
Filters |
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disposable
cartridge |
The Wafergard F cartridge and disposable filters
(cartridge models shown above) provide reliable point-of-use chemical filtration
applications. The all-in-one disposable filter/housing is designed for safe and
convenient in-line installation to minimize risks associated with handling
hazardous chemicals. Wafergard F filters provide wide chemical compatibility
with low extractables. |
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Wafergard® PI-250™ Cartridge
Filter |
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The Wafergard PI-250 Cartridge Filter has been
specially designed for use with photolithography and polyimide process fluids at
ambient temperatures. Constructed from a unique hollow fiber membrane, the
Wafergard PI-250 Cartridge Filter delivers outstanding particle retention and
high flow rates in the most demanding high viscosity chemical
applications. |
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Microgard Minichem D PR and D PR Long
Disposable Filters |
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Microgard Minichem-D PR and D PR Long filters are
ideal for small- to mid-volume point-of-use photochemical filtration
applications. These filters are specifically designed for use with photoresist
and developer. Microgard Minichem-D PR filters are especially effective for
filtration of developers such as NMD-W and NMD-3. The Microgard Minichem-D PR
filters use Ultra High Molecular Weight Polyethylene (UPE)
membrane, which has the highest retention efficiency of any membrane:
>99.999% at the rated pore size. Microgard Minichem-D PR filters offer low
surfactant binding, superior wettability in photochemicals and the highest
standards of downstream cleanliness. Combining superior performance with the
added safety and compact disposable design make Microgard Minichem-D PR filters
the ultimate choice for photochemical filtration. |
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Microgard Minichem 16/40
Filters |
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Ideal for small- to mid-volume point-of-use
photochemical filtration, Microgard Minichem 16/40 filters are designed for use
with photoresist and other photochemical solvents. Microgard Minichem filters
have a particle removal efficiency of 99.999% at the rated pore size, which is
the highest efficiency of any membrane. Microgard Minichem filters do not
require prewetting. The patented UPE technology provides excellent microbubble
removal, low surfactant binding and superior downstream cleanliness. |
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Microgard™ Minichem Disposable
Filters
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Microgard Minichem Disposable filters are ideal for
small and mid-volume point-of-use photochemical filtration applications. These
filters use Ultra High Molecular Weight Polyethylene (UPE)
membrane, which has the highest retention efficiency of any membrane: >
99.999% at the rated pore size. Microgard Minichem Disposable filters offer low
surfactant binding, superior wettability and the highest standards of downstream
cleanliness. Combining superior performance with the added safety and compact
disposable design make Microgard Minichem Disposable filters the ultimate choice
for photochemical filtration. |
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Panelgard™ PDP Disposable
Filters |
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The Panelgard PDP filter is a final point-of-use
surface type cartridge filter using unwoven polypropylene material. With high
retention efficiency, high flow rate and long product life, it contributes to
better cost performance. |
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Panelgard ™ 1-2-3 Disposable Filter
and Stand-Alone Manifold
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The Solution For Rapid Filter Change-Out
• Rapid filter change-out with minimal dripping:
With NO tools and NO draining required, you can change the filter in less than 1
minute
• Self contained filter structure
minimizes contamination due to handling of membrane cartridges
• Used with Panelgard manifold to provide rapid filter
change-out.
• Compact, stable design
provides easy installation or retrofit into existing tools.
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Panelgard™ PDP-40 Cartridge
Filters
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The Panelgard PDP-40 cartridge filter is a final
point-of-use surface type cartridge filter using unwoven polypropylene material.
With high retention efficiency, high flow rate and long product life, it
contributes to better cost performance. |
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Processgard™ Inline
Filter |
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Compact, low hold-up volume, inline
design. Vented, disposable
filter. Cost effective, unwoven
polypropylene material. |
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Optimizer® DEV and DI Disposable
Filters |
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The Optimizer DEV and DI point-of-use filters meet
small to mid-volume photochemical filtration needs for positive developer and DI
water applications. Optimizer filters use ultra-high
molecular weight polyethylene (UPE) membrane. This surface- modified UPE
membrane matches the surface energies and surface tensions of the base fluids.
By adjusting the membranes. critical surface energy higher than the base solvent
these filters mimimize the potential for de-wetting, optimize the full use of
the membrane, and ensure maximum flow. |
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Optimizer DI and Optimizer
DI-L |
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Disposable filters with superior wettability and the highest standards of
downstream cleanliness. Uses 's patented ultra high molecular weight polyethylene (UPE) membrane,
which has the highest retention efficiency of any membrane: >99.999% at the
rated pore size. No prewetting required. |
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Optimizer™ PR 16/40
Filters
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The Optimizer PR 16/40 filters use Ultra High Molecular Weight Polyethylene (UPE) membrane. This eliminates
pre-wetting, optimizes the full use of the membrane and ensures maximum flow. |
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Optimizer™ ST DEV and DI Disposable
Filters |
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Rapid filter change-out with minimal
dripping: With NO tools and NO draining required, you can change the filter in
less than 1 minute!
Self contained filter structure
minimizes contamination due to handling of membrane cartridges.
Optimizer ST DEV filter is best
recommended for use in positive developer solutions, as well as DI water. Optimizer ST DI filter is recommended
for use with DI water only. Used with Optimizer ST manifold to
provide rapid filter change-out.
Compact, stable design provides easy
installation or retrofit into existing tools. |
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Optimizer™ ST Manifold |
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Rapid filter change-out with minimal
dripping: With NO tools and NO draining required, you can change the filter in
less than 1 minute! Compact, stable design provides easy
installation or retrofit into existing tools. |
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IMPACT® 2 Disposable Filters |
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Rapid changeout UPE membrane filters
for point-of-use photochemical filtration including photoresists and
solvents. |
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IMPACT® 2 Manifold
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For use with
IMPACT™ 2 filters for photochemical filtration
including photoresists and solvents. |
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IMPACT LHVD Disposable
Filters |
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Rapid filter changeout with minimal dripping: With
NO tools and NO draining required, you can change the filter in less than 1
minute! Designed to minimize wasted
chemicals. Hollow fiber construction
maximizes microbubble venting. Instantly
wets in photoresist and will NOT dewet in solvent-based solutions. Ultra High Molecular Weight Polyethylene (UPE) requires no prewetting
with most photochemical solvents. |
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IMPACT® SR LHVD Disposable
Filter
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Rapid change-out, all Teflon
fluoropolymer filter for point-of-use filtration of aggressive
solvents. |
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IMPACT® ST Manifold
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For use with IMPACT® LHVD and IMPACT
Plus filters for point-of-use applications in photolithography. |
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Fluoroline SL-3 Filters |
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Fluoroline SL-3 disposable filters are
designed for the filtration of high-purity process fluids at flow rates of up to
2 liters per minute. Constructed of PTFE membrane on PFA supports, Fluoroline
SL-3 filters are compatible with a wide range of acids, bases and non-flammable
solvents at ambient temperatures. They are available in three pore sizes to
provide the flexibility needed in today’s dynamic manufacturing environments.
The filter cartridge is safely sealed within a PFA housing to minimize chemical
handling, thereby promoting a healthy work environment. The Fluoroline SL-3
filter’s compact size allows for minimal downtime during change outs. |
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Fluoroline™ P1000 Filters |
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Fluoroline high-performance filters provide optimum
performance in low-flow applications at flow rates up to five liters per minute.
Constructed entirely of Teflon® fluoropolymer resin, these cost-effective
filters provide compatibility with a wide range of acids, bases and
non-flammable solvents at ambient temperatures. A compact size permits space-saving design, and
Pillar® and Flaretek® fittings allow installation flexibility. Filter change-out
time is reduced due to the convenient disposable design which also minimizes
exposure to chemicals. |
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Fluoroline™-S Disposable
Filters |
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Fluoroline-S disposable filters are designed for the
filtration of high purity process fluids at very low flow rates. Constructed of
PTFE membrane on PFA supports, Fluoroline-S disposable filters are compatible
with a wide range of acids, bases, and non-flammable solvents. Typical uses
include the point-of-use filtration of spin on glass (SOG), antireflective
coating (ARC), hexamethyldisilazane (HMDS), photoresist, developer, and water.
They are available in three retention ratings to provide the flexibility needed
in these applications. |
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Photochemical
Dispense Systems
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Encompass® HV Fluid Dispense
System
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High viscosity fluids (such as polyimides) require
repeatable, clean dispenses with optimum suckback control. Encompass systems -
with point-of-use, programmable dispense recipes - meet these
requirements. A programmable controller provides precise,
independent control of all fluid handling functions. These systems download all
process parameters using a removable handheld terminal. The Encompass Dispense System uses a three-way circulation
valve to ensure continuous fluid motion and reduce viscosity changes. In
filtering and dispensing high viscosity fluids, the three-way valve also reduces
chemical waste by recirculating the fluid to the feed bottle or
reservoir. |
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IntelliGen®2 Dispense System with
Digital Valve Control (DVC) |
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The IntelliGen 2 Photochemical Dispense System with
Digital Valve Control (DVC) incorporates the latest advances in photochemical
filtration/dispense technology. The
IntelliGen 2 Photochemical Dispene System uses two-stage dispense
technology to operate dispense and filtration functions independently. This
delivers a repeatable, reliable, and accurate dispense to ensure process
stability. With the introduction of
Digital Valve Control, the system provides fully automated control over external
stop suckback valves and eliminates all manual operation. This allows precise
control of the fluid at the beginning and end of dispense, enabling consistent
control of today's advanced chemistries. The IMPACT® LHVD Filter combines advanced UPE membrane technology with
innovative device design, creating an easy-to-use filter. It minimizes
photochemical exposure and waste while maintaining outstanding point-of-use
defect removal performance. |
