Gas Pressure Measurement & Display

2 Inch Stainless Steel Gauges

  The 2 inch gauges were designed and developed for the demanding high-purity applications of the semiconductor industry. With an accuracy of 1% of full scale, the 2 inch gauge offers a reliable and efficient way to monitor pressure locally. This durable measuring device comes in a variety of process corrections, pressure ranges, and socket orientations.

2 Inch Stainless Steel Indicating Pressure Switch

   The IPS-122 Stainless Steel Indicating Pressure Switch provides a high-purity, precision pressure gauge and electronic switch with adjustable pressure switch setpoint. This compact 2 inch unit has the ability to operate lights or relays up to a maximum of 12 watts. Available in a variety of pressure ranges and process connections, and cleaned and double bagged in a Class 100 environment, this device provides solid state switching for cleanroom and hazardous applications.

2 Inch Stainless Steel Indicating Pressure Transmitter

  With a variety of outputs available, the 2 Inch stainless Steel Indicating Pressure Transmitter (IPT) is a very versatile sending unit. Accurate within 1% of full scale, the IPT can provide 0 - 5 VDC, 1 - 5 VDC or 4 - 20 mA outputs with pressure ranges up to 4,000 psi. The IPT is cleaned and double bagged in a Class 100 environment for ultimate high purity.

Conventional Pressure Transducers

   SPT and HPT model pressure transducers are the ultimate in high purity and accuracy for pressure monitoring. Cleaned and packaged in a Class 10 environment, the SPT and HPT meet the most rigid semiconductor high purity specifications. With accuracy of better than 0.25% of full scale, the SPT and HPT transducers will provide years of reliable pressure monitoring for most semiconductor applications. The SPT and HPT models have one of the smallest footprints in the industry for quick and easy installation in the tightest areas.

GCS314 Platform Scale

   The GCS314 scale is known for its robust design to withstand industry-grade abuse. The stainless steel design provides resistance to harsh chemicals and corrosive gases. The scales have a sealed semiconductor load-cell which precisely weighs cylinders to within 0.1% accuracy of full scale. This allows cylinder and vessel depletion to lowest levels, reducing downtime and material cost. Scales come in a variety of ranges and sizes to fit almost any weighing application.

GCS400 Series Low Profile Platform Scale

  The robust GCS400 Series scale is designed to stand up to industry-grade abuse. A heavy gauge stainless steel housing provides superior resistance to harsh chemical and corrosive environments. The GCS400 Series scale is also designed to enable the depletion of cylinder and vessel contents to the lowest possible levels, reducing your downtime and material costs. In addition to rugged reliability, these scales feature an environmentally sealed load-cell that precisely weighs cylinders in all environments. The GCS400 Series is offered in 9.25” x 9.25” size with 100 lbs and 300 lbs full scale ratings.

IDG202 Digital Pressure Gauge

   The IDG202 series in-line gauges provide local display of process pressure. Local display of process pressure improves safety and quality control of the gas delivery systems. The IDG202 is battery-powered or can be powered by an external 6 VDC power supply. The IDG202 digital gauge provides accurate, reliable and easy to use pressure measurement and display.

LR050/LR051/LR052 Series Pressure Transducer Displays

    Local display of process pressure improves safety and quality control of the gas delivery systems. The LR050 allows a 4-20mA sensor to digitally display its pressure and send its signal to a final destination. The sensor, such as a 204 series pressure transducer, connects to either the back or bottom of the LR-050 with a 4-pin, Bendix® connector. The LR050 connects to the loop through either a 2-wire, pigtail cable or a 4-pin male Bendix connector. The LR050 offers a real time reading. It is loop powered, single channeled, and can swivel around the transducer so the viewing angle can be adjusted. The display has red LED backlighting for easy reading in low ambient light. The LR051 has one adjustable alarm setpoint. The LR052 has two adjustable alarm setpoints.

LR250™ 2-Channel Display/Controller

   The LR250 display is designed to interface with analog sensors and actuators while providing connectivity to LON-based data acquisition and control networks. The display’s analog input module includes a high impedance differential input architecture combined with a precision low-noise, 24-bit sigma delta analog-to-digital converter to provide superior accuracy and temperature stability. The 1/8 DIN aluminum enclosure and shielded membrane keypad provides immunity to ESD, RFI and EMI.

LR300™ Multi-Channel Display/Controller

   The LR300 is a 4-channel display and controller that incorporates two setpoints per channel for multiple alarm conditions. The inputs are designed with 16 bit accuracy for precision interface with sensors and actuators. An RS232/RS485 interface with a simple ASCII prototcol provides networking capabilities for remote monitoring. User friendly, easily programmed, performs math, Tare and scaling functions. User definable alpha/numerics for units and messages. Easily calibrated, has three modes of calibration. Two models which measure up to four analog inputs or two strain gauge inputs.

PR050 Digital Display

  The PR050 is a single channel display designed for panel monitoring of various sensors and actuators. The scale and input selector switches mounted on the circuit board make it field configurable for a variety of signal inputs and ranges. This unit is ideal for PLC applications where a local display is needed between the transducer and PLC. Unique power bus output supplies power directly to a measuring device. Ideal for semiconductor processes and applications requiring stability in local or remote value readout. Displays vacuum, temperature, particles, ppm/ppb, pressure, weight and several other units.

SolidSense® 1.5" Surface Mount Pressure Transducers

  SolidSense SL 1.5” surface mount transducers are manufactured using a patented pressure sensing technology. SolidSense SL 1.5” surface mount transducers combine the superior performance of thin film technology with the manufacturing advantages of semiconductor processes. Using a Plasma Enhanced Chemical Vapor Deposition (PECVD) process, we have created a repeatable, reliable method of molecularly bonding sensing elements to metal substrates. Furthermore, by using statistical process control on our automated batch processing of pressure sensors, Mykrolis has reduced process variance. This unique manufacturing process minimizes operator handling of components and delivers a cleaner and more accurate device. SolidSense SL 1.5” surface mount transducers consume the least amount of space on gas panels comparted to standard inline designs, while reducing parts inventories and variations. SolidSense SL 1.5” surface mount transducers are available in both C-Seal and W-seal interfaces. You can rely on SolidSense SL 1.5” surface mount transducers for accurate and precise pressure monitoring in ultra-high purity environments. SolidSense SL 1.5” surface mount transducers are backed by a global support network unlike that offered by any other supplier of components for the microelectronics industry.

SolidSense® SL 1.125" Surface Mount Transducers

   SolidSense SL 1.125” surface mount transducers are manufactured using a patented pressure sensing technology. SolidSense SL 1.125” surface mount transducers combine the superior performance of thin film technology with the manufacturing advantages of semiconductor processes. Using a Plasma Enhanced Chemical Vapor Deposition (PECVD) process, we have created a repeatable, reliable method of molecularly bonding sensing elements to metal substrates. Furthermore, by using statistical process control on our automated batch processing of pressure sensors, Mykrolis has reduced process variance. This unique manufacturing process minimizes operator handling of components and delivers a cleaner and more accurate device. SolidSense SL 1.125” surface mount transducers consume the least amount of space on gas panels comparted to standard inline designs, while reducing parts inventories and variations. SolidSense SL 1.125” surface mount transducers are available in both C-Seal and W-seal interfaces. You can rely on SolidSense SL 1.125” surface mount transducers for accurate and precise pressure monitoring in ultra-high purity environments. SolidSense SL 1.125” surface mount transducers are backed by a global support network unlike that offered by any other supplier of components for the microelectronics industry.

SolidSense® TF Thin Film Pressure Transducers

   SolidSense TF transducers are manufactured using a patented pressure sensing technology. SolidSense TF transducers combine the superior performance of thin film technology with the manufacturing advantages of semiconductor processes. Using a Plasma Enhanced Chemical Vapor Deposition (PECVD) process, we have created a repeatable, reliable method of molecularly bonding sensing elements to metal substrates. Furthermore, by using statistical process control on our automated batch processing of pressure sensors, Mykrolis hasreduced process variance. This unique manufacturing process minimizes operator handling of components and delivers a cleaner and more accurate device. You can rely on SolidSense TF transducers for accurate and precise pressure monitoring in ultra-high purity environments. SolidSense TF transducers are backed by a global support network unlike that offered by any other supplier of components for the microelectronics industry.

SureView DR Dual Range Transducer Display

   The SureView DR Display is a miniture in-line display featuring two units of measure per range. The standard units are PSI and MPa. Local display of process pressure improves safety and quality control of the gas delivery systems. Local dual range and dual units of measure enable reduction of OEM part numbers and inventory requirements along with simplifying the documentation and configuration requirements for products targeted for global markets. The standard SureView DR Display is designed to interface to transducers with 100 PSI or 250 PSI full scale outputs. Together, the Millipore pressure transducer and SureView DR Display provide the most accurate, reliable and easy to use pressure measurement and display system in the industry.

ThruTube Pressure Transducers

   The continuous flow design of the NTT and HTT series pressure transducers are perfect for high purity requirements of the semiconductor industry. The NTT and HTT are true flow through devices having zero dead volume and come in a variety of pressure ranges, outputs and process connections. With a small footprint and replaceable electronics, the NTT and HTT are easy to install and maintain for years of service.

EL-PRESS Electronic Pressure Transducers/Controllers

    The EL-PRESS series electronic pressure transducers and controllers for gases and liquids have a well-proven compact thru-flow design. The instruments include a diaphragm type piezo-resistive pressure sensor for pressure measurement/control from: lowest ranges 2 ... 100 mbar absolute, gauge or differential; up to highest ranges 8 ... 400 bar absolute or gauge; differential pressure transducers have a max. range of 0,3 ... 15 bar dif.

FEATURES

Thru-flow design

Compact arrangement

Suitable for liquids and gases

High pressure capability up to 400 bar

Metal sealed version: see COMBI-FLOW series

High accuracy and repeatability

PRESSURE RANGES

COMBI-FLOW® Metal Sealed Mass Flow and Preassure Meters/Controllers

    The instruments of the COMBI-FLOW series are characterised by the fact that there is only one metal-to-metal seal per module; this seal Maintains its tightness over and over again. They distinguish themselves by a high surface quality and are therefore especially suitable for meeting the semi-conductor industry requirements as well as other high purity gas applications. The base block of the modules is identical for each different function (except the on-off valve function) and can be put in series by using either vacuum couplings or welded connections.

FEATURES

   Voltage regulation; temperature compensation; electro-chemically polished surfaces; mounting attitude insensitivity; reduced dead volume; vibration insensitivity; metal-to-metal seals; super stable sensor.

AVAILABLE MODULES

Mass Flow Meters (F1/F2) For flows between 0,2 ... 10 mln/min and 2 ... 100 ln/min N₂-equivalent.

Pressure Transducer (P5/P6/P7) With piezo-resistive pressure sensor for pressure ranges between 2 ... 100 mbar and 0,2 ... 10 bar absolute or relative.

Filter (M0/M1) As ultra pure PVDF fine filter 0,05 µm or sintered stainless steel filter 0,5, 2, 7 or 15 µm.

Control valve (C0/C1) Normally closed or open, for flow or pressure control with Kv max. 4,9 x 10^-2. Maximum temperature 70°C.

On/Off Valve (S0/S1) Pressure activated, NO or NC.

Differential pressure sensor & transducers

Differential Pressure Sensor SDP1000 for gases: Low cost & offset-free!

   Low cost sensor with differential pressure measurement range from 0.1 Pa to 3500 Pa (0.0004-14 inch water). Ideal for high volume applications due to simple handling and very attractive pricing for OEM applications. Analog voltage output. Fully calibrated and temperature compensated.

Differential Pressure Sensor ASP1400: Precise & offset free!

   Differential pressure measurement range from 0.001 to 100 Pa. Ideal for very low differential pressures, because it is offset free and without drift. Calibrated and temperature compensated. With digital RS-232 output.

OEM Solutions for differential pressure measurement

   Starting with the standard products of our leading CMOSens^® technology, we develop and customize sensor modules and complete instruments for a wide range of different applications, such as: automatic building control, process control, etc.