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The
development of semiconductor integrated circuit
(SIC) industry accelerated microelectronic production
equipment development. IC industry is typical
& vital among technology-driving industry,
one generation progress equipment supported
the corresponding device progress, the device
progress technology speedy development required
qualified production equipment should be launched
in advance to match progress requirement to
fulfill the required high percentage yield and
hyperfine progressing performance. Therefore,
fabrication equipment and related progress researching
& developing are playing an important technical
innovation forerunner role in the each IC technical
generation upgrade. The renovation of semiconductor
equipment will directly promote semiconductor
progressing and product, as well as electronic
complete machine product updating. IC production
equipment could be described as the “solidification”
of IC progressing technology, almost all IC
manufacturing technologies are “coagulated in
the equipment”.
We
are the large industrialized microelectronic
equipment manufacturer with close integrating
researching, manufacturing and marketing performance.
Our products such as diffusion system, etching
system, CVD system, cleaning system keep ahead
of national-made similar products, which is
widely applied in LSI, semiconductor discrete
device, electric electronic components, photoelectric
device, intelligent micro-mechanic system and
silicon solar battery fields.
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Semiconductor
Processing Equipment
