|
 Specialized wet processing stations
Manual, semi-automated, and full-automated
stations are available for product development
through to production.
|
 |
|
Wet
Processing Stations:
Metal
Lift Off; Wafer Cleaning; Ultrasonic Agitation;Dump
& Cascade DI Rinse.
Semiconductor
Etching Stations:
Si,
GaAs, InP; Dielectrics: SixNy,
SiO2
|
Fume hoods
Quality
fume hoods are designed for safe and easy operation.
Standard system include 2ft, 4ft, 6ft and 8ft
units for Cleaning, Etching, Plating, Stripping,
Polishing and many other process solutions...
|
|
|
Large
front access area; Configurable tank layout;
DI rinse tank options; Easy open & close
safety shields; EPO Emergency button; Optional
heated, filtered and rinse tanks; Minihelic
Exhaust Guage; Low maintenance design; Meets
3rd. party electrical inspection; CE and Semi
S2 certificates available; FMGlobal 4910 material
options; Stainless steel construction option;Optional
fire suppression system.
|
Manual
operation
Manual
operation wet benches are designed for safe
and easy operation. Standard system include
2ft, 4ft, 6ft and 8ft units for Cleaning, Etching,
Plating, Stripping, Polishing and many other
process solutions...
|
|
|
Configurable
tank layout; DI rinse tank options; Easy open
& close safety shields; EPO Emergency button;
Optional heated, filtered and rinse tanks; Minihelic
Exhaust Guage; Low maintenance design; Meets
3rd. party electrical inspection; CE and Semi
S2 certificates available; FMGlobal 4910 material
options; Stainless steel construction option;
Optional fire suppression system.
|
Semi
Automated Wet Processing Equipment for Cleaning,
Etching, Plating, Stripping, Polishing and many
other process solutions...
|
|
|
Easy
operator touch screen interface; Capable of
processing cassettes 300mm substrates; Real
time process viewing/tracking; Historical data storage;
Friendly recipe editor; Administrator control screens;
Programmable security levels; Full function maintenance
controls; Unlimited programmable recipes;
SECS-GEM communication capabilities; Meets
3rd. party electrical inspection; CE and Semi S2
certificates available; FMGlobal 4910 material options;
Optional fire suppression system.
|
Fully
Automated Wet Processing Equipment for Cleaning,
Etching, Plating, Stripping, Polishing and many
other process solutions...
|
|
|
Easy
operator touch screen interface; Configurable for
dry to dry processing; FOUP Load port options; Multitasking
feature for high throughput; Capable of processing
cassettes of 800mm substrates; Real time process
viewing/tracking; Historical data storage; Friendly
recipe editor; Administrator control screens; Programmable
security levels; Full function maintenance controls;
Unlimited programmable recipes; Can accept
and pass cassettes to other equipment; SECS-GEM
communication capabilities; Meets 3rd. party electrical
inspection; CE and Semi S2 certificates available;
FMGlobal 4910 material options; Optional fire suppression
system.
|
Lamarflo
Wet Benches
Temperature
controlled etch tanks; Two DI rinse tanks with weirs;
Solvent tanks; Ultrasonic cleaning tank; Spin rinse
dryer for 100 mm wafers.
|
|
