MAGNATRAN 7.1/60/70/74 Multitran 5 (Brooks)
Vacuum Robot
Single/Dual/LeapFrog Arm
OEM: Novellus/Lam/Anelva/Akt
GenMark Robot & Controller
ATM Robot
Single Arm
GB3/GB4/GB4P
Controller with robot
OEM: Canon
Equipe(PRI) Robot & Controller
ATM Robot
ATM/ABM-100,200,300,400
DBM Series
ESC Controller
OEM:KLA/ThermaWave/Others
Acu / AquaTran – Series
ATM Robot
Single Arm
OEM: Novellus/Lam
RR700/PR701/PR717/713/304
ATM Robot
Single Arm/Dual Arm
OEM: AMAT/CMP/ULVAC/ Novellus/Nicon/Canon
RA301/210
ATM wafer aligner
200/300mm
OEM: Novellus/Ulvac/Nikon/Canon
Others
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Specialized Service for most of Robot Transfer System
- Modify, Refurbish, Repairing Service Program Available for the Robot, Controller, Armset, Elevator, Transfer Chamber etc.
Best Technology with extensive OEM Robot company experience
- Brooks Automation Repair Center manager for 5 years.
Confidence & Responsibility
Propose the Best Price and Delivery
- Lower price and shorten delivery lead time than original maker and other competitor.
Reliable & Accurate Final Qualification Test System
- 24 hours Hardware & Software final qualification test using the same OEM procedures.
Modification/Upgrade service of the Robot & Transfer System
- Customized modification service due to increase the productivity (Example; VTR5 to MTR5 Modification , MTR5 to MAG7 Upgrade).
Refurbishment Service of the Robot & Transfer System
- Fully refurbish and replace the most of the parts like a brand new robot system.
Repairing & Overhaul Service of the Robot & Transfer System
- Troubleshooting the robot and replace only trouble parts then overhaul.
Stock Level Exchange Service of the Robot & Transfer System
- Fast Backup service using our provide stock robot system.
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