VALVE Refurbishment – Solution for Fab cost reduction
CKD/MKS(HPS) Valve and other Valve Refurbishment
- Warranty: 6 month standard, but actual life time is the same as CKD or MKS;
- Analysis report with cost estimation before refurbishment;
- Metrological Certificate encloses;
- If controller is shipped with valves, calibration will be free of charge.
Part numbers Example – CKD, MKS (HPS), and other possible models acceptable
System № |
Valve № |
Controller № |
Remarks |
VEC – S8 – X0113 |
VEC – V8 – X0107
VEC – V8 – X0109 |
VEC – C8 – X0101
VEC – C8 – X0111 |
+ any Types for normal valve |
VEC – S8 – X0133 |
VEC – V8 – X0109 |
VEC – C8 – X0111 |
VEC – S8 – X0201 |
VEC- V8 – X0201 |
VEC- C8 – X0201 |
VEC – SHA8 – X0301 |
VEC – VH8 – X0301 |
VEC – CA8 – X0301 |
+ any types for High temperature |
VEC – SHA8 – X0302 |
VEC – VH8 – X0302 |
VEC – CA8 – X0302 |
VEC – SH8G – X0301 |
VEC – VH8G – X0301 |
VEC – CA8G – X0301 |
VEC – SH8G – X0302 |
VEC – VH8G – X0302 |
VEC – CA8G – X0302 |
VEC – SHA8 – X0305 |
VEC – VH8 – X0305 |
VEC – CA8 – X0305 |
VEC – SHA8G – X0305 |
VEC – VH8G – X0305 |
VEC – CA8G – X0305 |
VEC – SHA8 – X0307 |
VEC – VH8 – X0307 |
VEC – CA8 – X0307 |
VEC – SHA8 – X0307-1 |
VEC – VH8 – X0307-1 |
VEC – CA8 – X0308-1 |
Model |
Part number(spec) |
Remarks |
MKS (HPS) Valve |
93-8646 |
Heater Jacket Type |
99D0835 |
Normal Type |
MKS Main Valve |
100996194 / DU12L-3 / DT33 22 / DT5 33 / 58806 / 65798 |
Cleaning Spec’
- 1. The first Step Chemical Temp’
- 2. D.I.W.
- 3. The Second Step Chemical Temp’
- 4. Ultra-Sonic
- 5. AIR & N2 GAS Blowing
|
- - 950C/2.5Hr
- - 5 ~ 10MΩ
- - 250С/2Hr
- - 100kHz/1Hr
- - 900С/10Hr
|
Overhaul Part List/set – CKD
# |
Part name |
Spec |
# |
unit |
Remarks |
1 |
Valve Bellows |
ASL - 350 |
1 |
EA |
Normal, High temp |
2 |
BF Diaphragm |
M6 / 50 |
1 |
EA |
Normal, High temp |
3 |
Solenoid Valve |
EV-07 |
2 |
EA |
|
4 |
Solenoid Valve |
3PM219 – 00 – M1 - 3 |
2 |
EA |
|
5 |
Potentiometer |
S13FLP50A |
1 |
EA |
|
6 |
Heater - Jacket |
100V / 170W, 40W |
1 |
EA |
Normal |
7 |
Heater - Jacket |
100V / 205W, 50W, 40W |
1 |
EA |
High temp |
8 |
Inner Heater |
100V / 102W |
1 |
EA |
High Temp |
9 |
Cartridge Heater |
100V / 25W (100V / 15W) |
1 |
EA |
Normal, High temp |
10 |
O – Ring (Viton) |
P-80, G-125, G-25, G-70, P-8, P-30 |
1 |
SET |
Normal, High temp |
11 |
PCB Board 류 |
Special |
1 |
SET |
Valve & CTRL’ |
12 |
SMPS Board |
Special |
1 |
SET |
CTRL’ |
13 |
Cleaning |
Special |
1 |
SET |
|
|
Other parts |
Bellows Cap, Valve Actuator, Valve Housing, Diaphragm Unit, etc |
Overhaul Part List/set – HPS
# |
Part name |
Spec |
# |
Unit |
Remarks |
1 |
Valve Bellows |
SUS 304 (mold Type) |
1 |
EA |
|
2 |
Slow Pumping Bellows |
SUS 304 (Welder Type) |
1 |
EA |
|
3 |
Slow Valve Bracket Bolt |
SUS 316 |
1 |
EA |
|
4 |
Slow Valve Cover (Cap) |
AL 6061 |
1 |
EA |
Plated |
5 |
Slow Valve Block |
AL6061 , Teflon |
1 |
SET |
|
6 |
Slow Valve Seal Bracket |
Ulten |
1 |
EA |
|
7 |
Valve Bellows Spring Bracket |
Ulten |
1 |
EA |
|
8 |
O - Ring |
AS586-016, 111, 120, 121, 234, 243, 246 |
1 |
SET |
|
9 |
Cleaning |
Special |
1 |
SET |
|
Sub-Ass’y Repair
Heater Ass’y Repair
Lift & Valve Ass’y Repair
|
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